Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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!style="background:silver; color:black;" align="center" width="60"|Vapor sources | !style="background:silver; color:black;" align="center" width="60"|Vapor sources | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Line | ||
*1 | *1 | ||
*2 | *2 | ||
*3 | *3 | ||
*4 | *4 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Chemical | ||
*Water | *Water | ||
*FDTS (new source) | *FDTS (new source) | ||