Specific Process Knowledge/Thin film deposition/Antistiction Coating: Difference between revisions
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=== Process description === | === Process description === | ||
A cycle with 1 injection of FDTS at 0. | A cycle with 1 injection of FDTS at 0.500 Torr + 1 injection of water at 6 Torr reacts for 15 minutes. Then the process chamber is evacuated and a new cycle starts until 4 cycles are completed. This gives a total process time of some 80 minutes. | ||
=== Process sequence === | === Process sequence === | ||