Specific Process Knowledge/Etch/Wet Polysilicon Etch: Difference between revisions
No edit summary |
No edit summary |
||
Line 1: | Line 1: | ||
==Wet PolySilicon Etch== | ==Wet PolySilicon Etch== | ||
[[Image:Wet_PolySi_etch.jpg|300x300px|thumb|Wet PolySilicon Etch: positioned in cleanroom 4]] | [[Image:Wet_PolySi_etch.jpg|300x300px|thumb|Wet PolySilicon Etch (in the middle): positioned in cleanroom 4]] |