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Specific Process Knowledge/Thin film deposition/Antistiction Coating: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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=== Process description ===
=== Process description ===
The amount of FDTS is delivered in one cycle (4 injections of FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. The total process time is some 22 minutes.
The amount of FDTS is delivered in one cycle (4 injections of FDTS at 0.500 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. The total process time is some 22 minutes.


=== Process sequence ===
=== Process sequence ===
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Antistiction_Coating"