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Specific Process Knowledge/Thin film deposition/Antistiction Coating: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,794 edits
No edit summary
Line 42: Line 42:


{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1"  
|+'''The FLAT process sequence'''
|+'''The FLAT2 process sequence'''
|-
|-
! rowspan="3" align="center"| O<sub>2</sub> plasma
! rowspan="3" align="center"| O<sub>2</sub> plasma
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! rowspan="4" align="center"| Chemical # 1 (vapor order 1)
! rowspan="4" align="center"| Chemical # 1 (vapor order 1)
! Name  
! Name  
| FDTS
| FDTS2
|-
|-
! Line no.
! Line no.
| 3
| 2
|-
|-
! Cycles
! Cycles
Line 100: Line 100:
=== Process sequence ===
=== Process sequence ===
{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1"  
|+'''The STAMP process sequence'''
|+'''The STAMP2 process sequence'''
|-
|-
! rowspan="3" colspan="2" align="center"| O<sub>2</sub> plasma
! rowspan="3" colspan="2" align="center"| O<sub>2</sub> plasma
Line 115: Line 115:
! rowspan="4" align="center"| Chemical # 1 (vapor order 1)
! rowspan="4" align="center"| Chemical # 1 (vapor order 1)
! Name  
! Name  
| FDTS
| FDTS2
|-
|-
! Line no.
! Line no.
| 3
| 2
|-
|-
! Cycles
! Cycles
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