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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
All cleanroom materials. Please notice that III-V materials need to be run on the dedicated chuck!
All cleanroom materials.  
 
Please notice that III-V materials need to be run on the dedicated chuck!
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|style="background:LightGrey; color:black"|Batch
|style="background:LightGrey; color:black"|Batch