Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
No edit summary |
No edit summary |
||
Line 1: | Line 1: | ||
==KOH etch - ''Anisotropic silicon etch''== | ==KOH etch - ''Anisotropic silicon etch''== | ||
[[Image:KOH_4tommer.jpg|300x399px|thumb|KOH etch for 4" wafers: positioned in cleanroom 3]] |