Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

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==KOH etch - ''Anisotropic silicon etch''==
==KOH etch - ''Anisotropic silicon etch''==
[[Image:KOH_4tommer.jpg|300x399px|thumb|KOH etch for 4" wafers: positioned in cleanroom 3]]

Revision as of 14:42, 14 January 2008

KOH etch - Anisotropic silicon etch

KOH etch for 4" wafers: positioned in cleanroom 3