Specific Process Knowledge/Thermal Process/Furnace APOX: Difference between revisions
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Oxidation and annealing | Oxidation and annealing | ||
|style="background:WhiteSmoke; color:black"|Oxidation: | |style="background:WhiteSmoke; color:black"|Oxidation: | ||
*Wet: With bubbler (water steam + | *Wet: With bubbler (water steam + O<sub>2</sub>) | ||
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!style="background:silver; color:black" align="center"|Performance | !style="background:silver; color:black" align="center"|Performance | ||
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|style="background:LightGrey; color:black"|Gas flows | |style="background:LightGrey; color:black"|Gas flows | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*N<sub>2</sub>: | *N<sub>2</sub>: 0-10 slm | ||
*O<sub>2</sub>: 0-10 slm | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||