Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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For most samples the optical profiler provides fast and easy information without any sample preparation. However, it can be necessary to cover thin transparent layers (< 2 µm) with a thin layer of metal. | For most samples the optical profiler provides fast and easy information without any sample preparation. However, it can be necessary to cover thin transparent layers (< 2 µm) with a thin layer of metal. | ||
The resolution is limited by the objectives and the pixel resolution | The resolution is limited by the objectives and the pixel resolution. Also the depth of focus is limited, especially for higher magnifications. | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||