Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace: Difference between revisions
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!style="background:silver; color:black;" align="center"|Purpose | !style="background:silver; color:black;" align="center"|Purpose | ||
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*Annealing of wafers with aluminium | *Annealing of wafers with aluminium | ||
*Oxidation of wafers with aluminium | *Oxidation of wafers with aluminium | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||