Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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Performance | Performance | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Thickness | Thickness resolution | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*5 µm | *>5 µm | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"| | !style="background:silver; color:black" align="center" valign="center" rowspan="2"| | ||
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Batch size | Batch size | ||
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*One sample | *One sample | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Substrate materials allowed | | style="background:LightGrey; color:black"|Substrate materials allowed | ||