Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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!SEM - Jeol | !SEM - Jeol | ||
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!Model | |||
|FEI Nova 600 NanoSEM | |FEI Nova 600 NanoSEM | ||
|Leo 1550 SEM | |Leo 1550 SEM | ||
|Jeol JSM 5500 LV SEM | |Jeol JSM 5500 LV SEM | ||
|- | |- | ||
!Electron emitter type | |||
|FEG (Field Emission Gun) | |FEG (Field Emission Gun) | ||
|FEG (Field Emission Gun) | |FEG (Field Emission Gun) | ||
|Tungsten filament | |Tungsten filament | ||
|- | |- | ||
!EDX analysis | |||
|Oxford Inca system | |Oxford Inca system | ||
|Röntec system | |Röntec system | ||
|Not available | |Not available | ||
|- | |- | ||
!Vacuum modes | |||
|High vacuum (>2*10<math>^{-4}</math>mbar) and Low vacuum (0.1-1.9 mbar) | |High vacuum (>2*10<math>^{-4}</math>mbar) and Low vacuum (0.1-1.9 mbar) | ||
|High vacuum (>2*10<math>^{-5}</math>mbar) | |High vacuum (>2*10<math>^{-5}</math>mbar) | ||
|High vacuum and Low vacuum | |High vacuum and Low vacuum | ||
|- | |- | ||
!Detectors | |||
|High and Low vacuum detectors of SE and BSE electrons, HiVac Inlens SE detector and high resolution Low vacuum detector | |High and Low vacuum detectors of SE and BSE electrons, HiVac Inlens SE detector and high resolution Low vacuum detector | ||
|SE, Inlens SE and BSE detectors | |SE, Inlens SE and BSE detectors | ||
|High vacuum SE and BSE detector | |High vacuum SE and BSE detector | ||
|- | |- | ||
!Substrate size | |||
|Up to 6" wafer with full view | |Up to 6" wafer with full view | ||
|Up to 6" wafer with 4" full view | |Up to 6" wafer with 4" full view | ||
|Up to 4" wafer with full view | |Up to 4" wafer with full view | ||
|- | |- | ||
!Additional equipment | |||
|Kleindiek micromanipulator with Capres 4 point probe | |Kleindiek micromanipulator with Capres 4 point probe | ||
| | | | ||
| | | | ||
|- | |- | ||
!Best obtainable lateral resolution (strongly dependent on user skills and sample type) | |||
|Down to 1-2 nm | |Down to 1-2 nm | ||
|Down to 10 nm | |Down to 10 nm | ||
|Down to 20-30 nm | |Down to 20-30 nm | ||
|- | |- | ||
!General availability | |||
|Good | |Good | ||
|Poor | |Poor | ||
|Excellent | |Excellent | ||
|- | |- | ||
!Ease of use | |||
|A sophisticated user interface with many features and many different detectors: Complicated | |A sophisticated user interface with many features and many different detectors: Complicated | ||
|A simple user interface with joystick and a limited number of detectors: Relatively simple | |A simple user interface with joystick and a limited number of detectors: Relatively simple | ||
|A simple user interface with joystick with one detector: Very simple | |A simple user interface with joystick with one detector: Very simple | ||
|- | |- | ||
!User level access | |||
|Only experienced SEM users, masters/Ph.D students with special needs will be trained | |Only experienced SEM users, masters/Ph.D students with special needs will be trained | ||
|Any cleanroom user | |Any cleanroom user | ||
|Any cleanroom user | |Any cleanroom user | ||
|- | |- | ||
!Best usage | |||
|High resolution imaging of any sample | |High resolution imaging of any sample | ||
|High resolution imaging of any non-polymer sample | |High resolution imaging of any non-polymer sample | ||