Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions
Appearance
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|style="background:LightGrey; color:black"|Measurement accuracy | |style="background:LightGrey; color:black"|Measurement accuracy | ||
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*Highly dependent on analysis conditions (image quality and fitting model), usually around ±0.5°. | *Highly dependent on analysis conditions (image quality and fitting model), usually around ±0.5°. Using several measurement points is recommended. | ||
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!style="background:silver; color:black" align="left"|Process parameters | !style="background:silver; color:black" align="left"|Process parameters | ||