Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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|High vacuum (>2*10<math>^{-5}</math>mbar) | |High vacuum (>2*10<math>^{-5}</math>mbar) | ||
|High vacuum and Low vacuum | |High vacuum and Low vacuum | ||
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|Detectors | |||
|High and Low vacuum detectors of SE and BSE electrons, HiVac Inlens SE detector and high resolution Low vacuum detector | |||
|SE, Inlens SE and BSE detectors | |||
|High vacuum SE and BSE detector | |||
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|Substrate size | |Substrate size | ||
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|A simple user interface with joystick and a limited number of detectors: Relatively simple | |A simple user interface with joystick and a limited number of detectors: Relatively simple | ||
|A simple user interface with joystick with one detector: Very simple | |A simple user interface with joystick with one detector: Very simple | ||
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|User level access | |||
|Only experienced SEM users, masters/Ph.D students with special needs will be trained | |||
|Any cleanroom user | |||
|Any cleanroom user | |||
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|Best usage | |Best usage | ||
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|High resolution imaging of any non-polymer sample | |High resolution imaging of any non-polymer sample | ||
|Fast in-process imaging | |Fast in-process imaging | ||
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