Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions

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|style="background:LightGrey; color:black"|Substrate size
|style="background:LightGrey; color:black"|Substrate size
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*Up to 6" wafers. In order to measure a few square mm's of flat surface
*Up to 6" wafers. In order to measure a few square mm's of flat surface is required.
is required.
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Revision as of 13:54, 10 January 2014

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The Drop Shape Analyzer

The Krüss DSA 100S Drop Shape Analyzer will analyze the shape a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively.

The Krüss DSA 100s Drop Shape Analyzer

The user manual, user APV(s), technical information, and contact information can be found in LabManager:

Drop Shape Analyzer in LabManager

An overview of the performance of the Drop Shape Analyzer

Purpose Imaging and analysis of of the shape of the interface between liquid and air
  • Measurement of contact angle between sample surface and liquid
  • Measurement of surface tension of liquid
Performance Thin film materials that can be measured

Film with a refractive index of less than 2.02 and that are transparent to the light in the given wavelength range ex:

  • Silicon Oxide
  • Silicon nitride
  • polymers
Film thickness range
  • ~1µm to 15 µm
Film thickness accuracy
  • ±(0.5%+50Å)
Index accuracy
  • ±0.001
Process parameters Available liquids
  • Syringe 1: Water (H2O)
  • Syringe 2: Diiodo-methane (I2CH2)
  • Syringe 3: Benzyl alcohol (C6H5CH2OH)
  • Syringe 4: Available
Sample requirements Substrate material allowed
  • In principle all materials
Substrate size
  • Up to 6" wafers. In order to measure a few square mm's of flat surface is required.
Batch size
  • One sample at a time

anything

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