Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions

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VisualWikitext

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 *±0.001
 |-
-!style="background:silver; color:black" align="left"|Process parameter range
+!style="background:silver; color:black" align="left"|Process parameters
-|style="background:LightGrey; color:black"|Wavelength range
+|style="background:LightGrey; color:black"|Available liquids
 |style="background:WhiteSmoke; color:black"|
-Can operate at two different wavelength:
+*Syringe 1: Water (H2O)
-*633 nm
+*Syringe 2: Diiodo-methane (I2CH2)
-*1550 nm
+*Syringe 3: Benzyl alcohol (C6H5CH2OH)
+*Syringe 4: Available
 |-
-!style="background:silver; color:black" align="left"|Substrates
+!style="background:silver; color:black" align="left"|Sample requirements
-|style="background:LightGrey; color:black"|Batch size
+|style="background:LightGrey; color:black"|Substrate material allowed
+|style="background:WhiteSmoke; color:black"|
+*In principle all materials
+|-
+|style="background:silver; color:black"|
+|style="background:LightGrey; color:black"|Substrate size
 |style="background:WhiteSmoke; color:black"|
-*One sample at a time - all sample larger than 5x5 mm<sup>2</sup>sizes up to 6"
+*Up to 6" wafers. In order to measure a few square mm's of flat surface
+is required.
 |-
 |style="background:silver; color:black"|
-| style="background:LightGrey; color:black"|Substrate material allowed
+|style="background:LightGrey; color:black"|Batch size
 |style="background:WhiteSmoke; color:black"|
-*In principle all materials
+*One sample at a time
 |-
 |}
 ==anything==