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Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,366 edits
Line 56: Line 56:
|Thickness
|Thickness
|Non-uniformity (both over a single wafer
|Non-uniformity (both over a single wafer
and over the boat)
and over the boat)
|-
|-
!Dry1050
!Dry1050
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