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Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,329 edits
Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,329 edits
Line 60: Line 60:
!QC limits
!QC limits
|Thickness
|Thickness
|Non-uniformity (both single wafer and over the boat)  
|Non-uniformity (both single wafer  
and over the boat)  
|-
|-
!Dry1050
!Dry1050
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