Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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{| {{table}} | {| {{table}} | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Material''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Pattern''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Optics''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Frequency''' | ||
| align=" | | align="center" valign="top" style="background:#DCDCDC;"|''' Intensity''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Writing speed''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Other''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Parameter file''' | ||
|- style="background:LightGray" valign="top" | |- style="background:LightGray" valign="top" | ||
| Silicon | | Silicon | ||
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{| {{table}} | {| {{table}} | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Material''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Optics''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Frequency''' | ||
| align=" | | align="center" valign="top" style="background:#DCDCDC;"|''' Intensity''' | ||
| align=" | | align="center" valign="top" style="background:#DCDCDC;"|''' Power measured @10%''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Writing speed''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Number of burst''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Number of Z-offset''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Number of iteration''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Number of parallel lines''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Gap in between line''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Parameter file''' | ||
| align=" | | align="center" valign="top" style="background:LightGray"|''' Comments''' | ||
|- style="background:LightGray" valign="top" | |- style="background:LightGray" valign="top" | ||
| Silicon 525µm | | Silicon 525µm | ||