Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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==Quality Control - Parameters and Limits== | ==Quality Control - Parameters and Limits== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Controle (QC) for | |bgcolor="#98FB98" |'''Quality Controle (QC) for the processes "Wet1050" and "Dry1050"''' | ||
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*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2846&mach=47 The QC procedure for Boron | *[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2846&mach=47 The QC procedure for the Boron drive-in + pre-dep furnace A1]<br> | ||
*[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1987 The newest QC data for wet and dry oxide]<br> | *[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1987 The newest QC data for wet and dry oxide]<br> | ||