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Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions

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|-  
|-  
|Pressure
|Pressure
|Below 2*10<sup>-6</sup>
|Below 2*10<sup>-6</sup> mbar
|Below 2*10<sup>-6</sup>
|Below 2*10<sup>-6</sup> mbar
|-
|-
|}
|}
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