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| Line 45: |
Line 45: |
| | 0.43 | | | 0.43 |
| |- | | |- |
| |}
| |
|
| |
| The process developed by SPTS that fulfilled these criteria had the following parameters:
| |
|
| |
|
| |
| {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
| |
| |+ '''Process A recipe'''
| |
| |-
| |
| !
| |
| ! colspan="2" | Step 1
| |
| ! colspan="2" | Step 2
| |
| |-
| |
| ! width="120" | Parameter
| |
| ! width="120" | Etch
| |
| ! width="120" | Dep
| |
| ! width="120" | Etch
| |
| ! width="120" | Dep
| |
| |-
| |
| ! Gas flow (sccm)
| |
| | SF<sub>6</sub> 350 (1.5 s) 550
| |
| | C<sub>4</sub>F<sub>8</sub> 200
| |
| | SF<sub>6</sub> 350 (1.5 s) 550
| |
| | C<sub>4</sub>F<sub>8</sub> 200
| |
| |-
| |
| ! Cycle time (secs)
| |
| | 7.0
| |
| | 4.0
| |
| | 7.0
| |
| | 4.0
| |
| |-
| |
| ! Pressure (mtorr)
| |
| | 25 (1.5 s) 90 >> 150
| |
| | 25
| |
| | 25 (1.5 s) 150
| |
| | 25
| |
| |-
| |
| ! Coil power (W)
| |
| | 2800
| |
| | 2000
| |
| | 2800
| |
| | 2000
| |
| |-
| |
| ! Platen power (W)
| |
| | 120 >> 140 (1.5) 45
| |
| | 0
| |
| | 140 (1.5) 45
| |
| | 0
| |
| |-
| |
| ! Cycles
| |
| | colspan="2" | 11 (keep fixed)
| |
| | colspan="2" | 44 (vary this)
| |
| |-
| |
| ! Common
| |
| | colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
| |
| |} | | |} |
|
| |
|
