Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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*Wet oxide with O<sub>2</sub> and H<sub>2</sub> can be grown in furnace: A1, A3. | *Wet oxide with O<sub>2</sub> and H<sub>2</sub> can be grown in furnace: A1, A3. | ||
*Wet oxide with H<sub>2</sub>O in a bubbler can be grown in furnaces: C1, C3, D1, nobel. | *Wet oxide with H<sub>2</sub>O in a bubbler can be grown in furnaces: C1, C3, D1, nobel. | ||
The standard recipes, quality control limits and results for the Boron Drive-in and Phosphorus Drive-in furnaces can be found here: | |||
*[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]] | *[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]] | ||
*[[Specific Process Knowledge/Thermal Process/A3 Furnace Phosphorus drive-in|Standard recipes, QC limits and results for the Phosphorus Drive-in | *[[Specific Process Knowledge/Thermal Process/A3 Furnace Phosphorus drive-in|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]] | ||
==Comparison of the six oxidation furnaces== | ==Comparison of the six oxidation furnaces== | ||