Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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== | ==Quality Control - Parameters and Limits== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2''' | |bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2''' | ||
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*[http://labmanager.danchip.dtu.dk/d4Show.php?id= | *[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2846&mach=47 The QC procedure for Boron Furnace A1]<br> | ||
*[http://www.labmanager.danchip.dtu.dk/view_binary.php? | *[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1987 The newest QC data for wet and dry oxide]<br> | ||
{| {{table}} | {| {{table}} | ||
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! QC Recipe: | ! QC Recipe: | ||
! | ! Wet1050 | ||
|- | |- | ||
| | | H<sub>2</sub> flow | ||
| | |3 sccm | ||
|- | |- | ||
|O<sub>2</sub> flow | |O<sub>2</sub> flow | ||
| | |2 sccm | ||
|- | |- | ||
| | |Temperature | ||
| | |1050 C | ||
|- | |- | ||
| | |Oxidation time | ||
|30 | |30 min | ||
|- | |- | ||
|} | |} | ||
| align="center" valign="top"| | | align="center" valign="top"| | ||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px" | {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
!QC limits | !QC limits | ||
! | !Wet1050 | ||
! | !Dry1050 | ||
|- | |- | ||
| | |Thickness | ||
| | |108-114 nm | ||
| | |286-302 nm | ||
|- | |- | ||
|Non-uniformity | |Non-uniformity | ||
| | |3 % | ||
| | |5 % | ||
|- | |- | ||
|} | |} | ||
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|} | |} | ||
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==Overview of the performance of the boron drive-in furnace and some process related parameters== | ==Overview of the performance of the boron drive-in furnace and some process related parameters== | ||