Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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*Wet oxide with O<sub>2</sub> and H<sub>2</sub> can be grown in furnace: A1, A3. | *Wet oxide with O<sub>2</sub> and H<sub>2</sub> can be grown in furnace: A1, A3. | ||
*Wet oxide with H<sub>2</sub>O in a bubbler can be grown in furnaces: C1, C3, D1, nobel. | *Wet oxide with H<sub>2</sub>O in a bubbler can be grown in furnaces: C1, C3, D1, nobel. | ||
[[/A1 Bor Drive-in furnace|Boron Drive-in + Predep furnace (A1)]] | |||
==Comparison of the six oxidation furnaces== | ==Comparison of the six oxidation furnaces== | ||