Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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![[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | ![[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | ||
![[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|Nanoman]] | ![[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|Nanoman]] | ||
![[Specific Process Knowledge/Characterization/Profiler#Dektak III-V Profiler|Dektak III-V Profiler]] | |||
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|3D Profiler for measuring micro structures. Can do wafer mapping. | |3D Profiler for measuring micro structures. Can do wafer mapping. | ||
|AFM for measuring nanostructures and surface roughness | |AFM for measuring nanostructures and surface roughness | ||
|Profiler for measuring micro structures. | |||
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*Stitching: In principel a hole 6" wafer (time consuming) | *Stitching: In principel a hole 6" wafer (time consuming) | ||
|90 µm square | |90 µm square | ||
|Line scan x: 50-50000 µm | |||
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*94.4µm ->9984µm | *94.4µm ->9984µm | ||
|1 µm (can go up to 5 µm under special settings) | |1 µm (can go up to 5 µm under special settings) | ||
|130 nm | |||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
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*0.5µm -> 5µm | *0.5µm -> 5µm | ||
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | |Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | ||
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*Confocal (depending on objective): 1nm -> 50nm | *Confocal (depending on objective): 1nm -> 50nm | ||
|<1Å - accuracy better than 2% | |<1Å - accuracy better than 2% | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
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*Somewhere between 1:1 and 1:12 | *Somewhere between 1:1 and 1:12 | ||
|~1:1 with standard cantilever. | |~1:1 with standard cantilever. | ||
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*White broadband LED: 550nm | *White broadband LED: 550nm | ||
|<12 nm on standard cantilever | |<12 nm on standard cantilever | ||
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|Can be done | |Can be done | ||
|No stress calculation capability | |No stress calculation capability | ||
|Cannot be done | |||
|Cannot be done | |Cannot be done | ||
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|Can be done on a line or an area | |Can be done on a line or an area | ||
|Can be done on a selected surface area | |Can be done on a selected surface area | ||
|Recommended to use Dektak XTA or Dektak 8. | |||
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|Up to more than 6" | |Up to more than 6" | ||
|6" or less | |6" or less | ||
|4" or less | |||
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*Almost any material that does not leave residual on the stage, please check the responsible group for any non standard materials | *Almost any material that does not leave residual on the stage, please check the responsible group for any non standard materials | ||
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*Almost any material that does not leave residual on the stage. | |||
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