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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!'''Max. scan range z'''
!'''Max. scan range z'''
|1Å, 10Å, 40Å or 160Å
|50Å to 1mm
|1Å, 10Å, 80Å or 160Å
|50Å to 1mm
|Depending on measuring methode:
|Depending on the objective and Z resolution:
*PSI down to 0.01 nm
*94.4µm ->9984µm
*VSI down to 1 nm
|1 µm (can go up to 5 µm under special settings)
*Confocal (depending on objective): 1nm -> 50nm
|<1Å - accuracy better than 2%
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
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