Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

@@ Line 195: / Line 195: @@
 |-
 |-style="background:LightGrey; color:black"
-!Substrate size
+!'''Substrate size'''
-|
+|up to 8"
-*<nowiki>#</nowiki> small samples
+|up to 6"
-*<nowiki>#</nowiki> 50 mm wafers
+|Up to more than 6"
-*<nowiki>#</nowiki> 100 mm wafers
+|6" or less
-*<nowiki>#</nowiki> 150 mm wafers
-|
-*<nowiki>#</nowiki> small samples
-*<nowiki>#</nowiki> 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
 |-
@@ Line 218: / Line 212: @@
 *Allowed material 2
 *Allowed material 3
+|
+*
+|
+*
 |-
 |}