Jump to content

Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

Jml (talk | contribs)
Jml (talk | contribs)
No edit summary
Line 33: Line 33:
|
|
|
|
|-
|Max. scan range z
|<100Å to~0.3mm
|50Å to 262µm
|1 µm (can go up to 5 µm under special settings)
|-
|-
|Lateral resolution  
|Lateral resolution