Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
New page: This is a micrometer-screw. It measures with an accurracy within a few µm. Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration by the... |
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This is a micrometer-screw. | This is a micrometer-screw. | ||
[[image:SEM-Leo.jpg|200x200px|right|thumb|The Leo SEM has its own dedicated room: Cleanroom 9]] | |||
It measures with an accurracy within a few µm. | It measures with an accurracy within a few µm. | ||
Measure the wafer in the box next to the meter.If ok other wafers can be measured. | Measure the wafer in the box next to the meter.If ok other wafers can be measured. | ||
There is a calibration by the DEKTAK. | There is a calibration by the DEKTAK. | ||
It is calibrated at about 750µ | It is calibrated at about 750µ | ||
Revision as of 13:02, 9 January 2008
This is a micrometer-screw.
It measures with an accurracy within a few µm. Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration by the DEKTAK. It is calibrated at about 750µ