Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 56: | Line 56: | ||
|-valign="top" | |-valign="top" | ||
|'''Resolution z''' | |'''Resolution z''' | ||
|1Å, 10Å or | |1Å, 10Å, 40Å or 160Å | ||
|1Å, 10Å, 80Å or 160Å | |1Å, 10Å, 80Å or 160Å | ||
|Depending on measuring methode: | |Depending on measuring methode: | ||