Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
| Line 103: | Line 103: | ||
|1-20 nm | |1-20 nm | ||
Depends on what SEM you use | Depends on what SEM you use | ||
| | |Down to 1.4 nm | ||
| | | | ||
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| Line 116: | Line 116: | ||
|1-20 nm | |1-20 nm | ||
Depends on what SEM you use | Depends on what SEM you use | ||
| | |< 1 Å | ||
| | | | ||
|- | |- | ||
| Line 126: | Line 126: | ||
|Objectives and pixel size on the screen | |Objectives and pixel size on the screen | ||
|Interaction volume | |Interaction volume | ||
|Tip shape (standard tips: width 10 nm, angle 45<sup>o</sup>). It is possible to buy | |Tip shape (standard tips: width 10 nm, angle 45<sup>o</sup>). It is possible to buy Super Sharp tips and High Aspect Ratio tips | ||
|Stylus shape (width 5 μm, angle 45<sup>o</sup>) | |Stylus shape (width 5 μm, angle 45<sup>o</sup>) | ||
|- | |- | ||