Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
| Line 82: | Line 82: | ||
!Sample information | !Sample information | ||
| | | | ||
| | |3D surface topgraphy | ||
*Step height | *Step height | ||
*Surface roughness | *Surface roughness | ||
*Film thickness | *Film thickness | ||
| | | | ||
|3D | |3D surface topography | ||
| | |3D surface topography (if you make a map scan) | ||
|- | |- | ||