Specific Process Knowledge/Etch/Etching of TOPAS: Difference between revisions
| Line 44: | Line 44: | ||
==Under etching and local masking== | ==Under etching and local masking== | ||
{| border="1" cellspacing="1" cellpadding="2" align="left" | {| border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Silicon hard mask | ! Silicon hard mask|! Aluminum hard mask | ||
! Aluminum hard mask | |||
|- | |- | ||
|[[Image:TOPAS-Si-hard-mask_U50.jpg|200x200px]] | |[[Image:TOPAS-Si-hard-mask_U50.jpg|200x200px]] | ||