Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

Revision as of 11:36, 4 January 2008

Etching of aluminium is done wet at Danchip. We have two different solutions:

H $_{2}$ O:H $_{3}$ POFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _4} 1:2 at 50 ^oC
Pre-mixed etch solution: PES 77-19-04 at 20 ^oC

@@ Line 2: / Line 2: @@
 Etching of aluminium is done wet at Danchip. We have two different solutions:
-(1) H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
+# H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
-(2) Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
+# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C