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Specific Process Knowledge/Etch: Difference between revisions

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*[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch|Magnetic stack]] - ''containing Ta/MnIr/NiFe''
*[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch|Magnetic stack]] - ''containing Ta/MnIr/NiFe''
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[[/Deposition of TiW|TiW]] alloy (10%/90% by weight) <br/>
No results, use IBE|style="background: LightGray"|
[[/Deposition of NiCr|NiCr]] alloy  <br/>
[[/Deposition of AlTi|AlTi]] alloy
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*[[/Etching of Polymer|Polymer]]
*[[/Etching of Polymer|Polymer]]
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