Specific Process Knowledge/Thin film deposition: Difference between revisions
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| align="center" style="background:#f0f0f0;"|''' Parameters''' | |||
| align="center" style="background:#f0f0f0;"|''' Units ''' | |||
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| Temperature||deg C|| | |||
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| Pressure ||mbar|| | |||
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| Flow ||sccm|| | |||
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