Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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Wet oxide H2O in a bobler: | Wet oxide H2O in a bobler: | ||
Furnace:C1,C2,C3. | Furnace:C1,C2,C3. | ||
The filmquality of dryoxide is better than for wet oxide with regards to density and ? | |||
Revision as of 11:46, 16 January 2008
The thickness and the time it takes to grow the oxide often decides if a dry or wet oxidation is choosen.
Dry oxide is used from 5nm - 200nm. Furnace:A1,A3,C1,C2,C3.
Wet oxide with O2 and H2: Furnace:A1,A3.
Wet oxide H2O in a bobler: Furnace:C1,C2,C3.
The filmquality of dryoxide is better than for wet oxide with regards to density and ?