Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
New page: Dry oxide: Wet oxide with O2 and H2 Wet oxide H2O in a bobler |
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The thickness and the time it takes to grow the oxide often decides if a dry or wet oxidation is choosen. | |||
Dry oxide is used from 5nm - 200nm. | |||
Furnace:A1,A3,C1,C2,C3. | |||
Wet oxide H2O in a bobler | Wet oxide with O2 and H2: | ||
Furnace:A1,A3. | |||
Wet oxide H2O in a bobler: | |||
Furnace:C1,C2,C3. | |||
Revision as of 14:08, 2 January 2008
The thickness and the time it takes to grow the oxide often decides if a dry or wet oxidation is choosen.
Dry oxide is used from 5nm - 200nm. Furnace:A1,A3,C1,C2,C3.
Wet oxide with O2 and H2: Furnace:A1,A3.
Wet oxide H2O in a bobler: Furnace:C1,C2,C3.