Specific Process Knowledge/Etch/ICP Metal Etcher/Titanium: Difference between revisions
No edit summary |
|||
| Line 48: | Line 48: | ||
| 0.83 | | 0.83 | ||
|- | |- | ||
!Etch rate in TiO2 (nm/min) | |||
| | |||
| | |||
|} | |} | ||
No edit summary |
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,317 edits |
||
| Line 48: | Line 48: | ||
| 0.83 | | 0.83 | ||
|- | |- | ||
!Etch rate in TiO2 (nm/min) | |||
| | |||
| | |||
|} | |} | ||