Specific Process Knowledge/Lithography/Coaters/SprayCoater

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Spray Coater

Spray Coater in Cleanroom 3

Equipment		Spray Coater
Purpose		Spraying imprint resist Spraying photoresist Spraying of other solutions
Performance	Substrate handling	Can handle almost any sample size and shape
	Permanent media	No permanent media
	Manual dispense option	Two syringe pumps
Process parameter range	Solution viscosity	Range
	Chemical properties	Must be non-toxic Compatible with titanium Resistant to ultrasonic atomization
Substrates	Batch size	Any sample(s) that fit inside machine
	Allowed materials	All chemicals to be spray coated must be approved specifically for spray coating Any non-toxic, non-particulate and non-crosslinking material is likely to be approved

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager