Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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==KS Spinner== | ==KS Spinner== | ||
[[Image:KSspinner.JPG|300×300px| | [[Image:KSspinner.JPG|300×300px|right|thumb|The KS spinner is placed in Cleanroom 3.]] | ||
'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#KS_Spinner click here]''' | |||
At Danchip we have RC8-THP system which is one of the SUSS MicroTech spinners. | At Danchip we have RC8-THP system which is one of the SUSS MicroTech spinners. | ||
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'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=43 LabManager]''' | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=43 LabManager]''' | ||