Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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* The DUV process - including BARC and resist spinning, exposure, post exposure bake and development - will be performed by the Photolith group of Danchip. Any kind of inspection, evaluation and pre- and post-processing should be performed by the customer. | * The DUV process - including BARC and resist spinning, exposure, post exposure bake and development - will be performed by the Photolith group of Danchip. Any kind of inspection, evaluation and pre- and post-processing should be performed by the customer. | ||
== Equipment performance and process related parameters == | |||
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