Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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==Process information== | ==Process information== | ||
The users are not allowed to use the spinner. In case you would like to do DUV lithography please contact Lithography team, who will consult | The users are not allowed to use the spinner. In case you would like to do DUV lithography please contact Lithography team, who will consult you and run your wafers for you. | ||
Information about resist can be found here: | Information about resist can be found here: | ||