Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
| Line 170: | Line 170: | ||
*Silicon oxide | *Silicon oxide | ||
*Silicon (oxy)nitride | *Silicon (oxy)nitride | ||
*Nickel | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*All except for Polymers | *All except for Polymers | ||