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Specific Process Knowledge/Lithography: Difference between revisions

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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Generel description
!Generel description
|Generel description - method 1
|Pattern transfer via UltraViolet (UV) light
|Generel description - method 2
|Pattern transfer via DeepUltraViolet (DUV) light
|Electron beam lithography
|Electron beam lithography
|4
|4
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