Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions

Revision as of 08:37, 16 September 2013 view source Kabi (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 1,146 edits No edit summary ← Older edit		Revision as of 12:13, 21 February 2014 view source Kabi (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 1,146 edits →Wet etching of Titanium Newer edit →
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	Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom 2.		Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom B-1 or D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom B-1.