Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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|[[media:SU-8_DataSheet_2005.pdf|SU-8_DataSheet_2005.pdf]], [[media:SU-8_DataSheet_2075.pdf|SU-8_DataSheet_2075.pdf]] | |[[media:SU-8_DataSheet_2005.pdf|SU-8_DataSheet_2005.pdf]], [[media:SU-8_DataSheet_2075.pdf|SU-8_DataSheet_2075.pdf]] | ||
|[[Specific_Process_Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]] | |[[Specific_Process_Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]] | ||
| | |PGMEA, Mr60 developer | ||
| | |IPA | ||
| | |Plasma ashing can remove crosslinked SU8. | ||
|[[media:Process_Flow_SU8_70um.docx|Process_Flow_SU8_70um.docx]] | |[[media:Process_Flow_SU8_70um.docx|Process_Flow_SU8_70um.docx]] | ||