Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
| Line 85: | Line 85: | ||
|'''SU8''' | |'''SU8''' | ||
|Negative | |Negative | ||
|[http://microchem.com/Prod-SU82000.htm] | |[http://microchem.com/Prod-SU82000.htm Microchem] | ||
| | | | ||
|[[media:SU-8_DataSheet_2005.pdf|SU-8_DataSheet_2005.pdf]], [[media:SU-8_DataSheet_2075.pdf|SU-8_DataSheet_2075.pdf]] | |[[media:SU-8_DataSheet_2005.pdf|SU-8_DataSheet_2005.pdf]], [[media:SU-8_DataSheet_2075.pdf|SU-8_DataSheet_2075.pdf]] | ||