Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions

@@ Line 72: / Line 72: @@
 |style="background:LightGrey; color:black"|Process Temperature
 |style="background:WhiteSmoke; color:black"|
-*Approximately room temperature
+*Less than 80 <math>_o</math>C
 |-
 |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Process pressure
 |style="background:WhiteSmoke; color:black"|
-*~10<sup>-6</sup> - 10<sup>-5</sup> mbar
+*~3x10<sup>-7</sup> - 4x10<sup>-6</sup> mbar
 |-
 !style="background:silver; color:black" align="left"|Substrates